Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11623860 | Interposer substrate, MEMS device and corresponding manufacturing method | Joerg Muchow, Rainer Straub, Stefan Mark | 2023-04-11 |
| 10866407 | Micromechanical component and method for producing a micromechanical component | Daniel Maier, Joerg Muchow, Helmut Grutzeck, Rainer Straub, Stefan Mark +1 more | 2020-12-15 |