| 11623860 |
Interposer substrate, MEMS device and corresponding manufacturing method |
Corinna Koepernik, Joerg Muchow, Stefan Mark |
2023-04-11 |
| 11130672 |
Micromechanical device and corresponding production method |
Johannes Baader, Nicolas Schorr, Stefan Pinter, Tina Steigert |
2021-09-28 |
| 11124412 |
Manufacturing method for a micromechanical window structure and corresponding micromechanical window structure |
Joerg Muchow, Stefan Pinter |
2021-09-21 |
| 10989913 |
Micromechanical component and method for producing a micromechanical component |
Andreas Finn, Frederic Njikam Njimonzie, Helmut Grutzeck, Joerg Muchow |
2021-04-27 |
| 10866407 |
Micromechanical component and method for producing a micromechanical component |
Daniel Maier, Joerg Muchow, Corinna Koepernik, Helmut Grutzeck, Stefan Mark +1 more |
2020-12-15 |
| 10775610 |
Micromechanical actuator device and method for tilting a micromechanical actuator device |
Benjamin Steuer, Frederic Njikam Njimonzie, Joerg Muchow, Stefan Pinter |
2020-09-15 |
| 10589988 |
Mechanical component and manufacturing method for a mechanical component |
Wolfgang Heinzelmann, Mohamad Iyad Al Dibs, Stefan Pinter, Frederic Njikam Njimonzie, Joerg Muchow +3 more |
2020-03-17 |
| 10222609 |
Micromirror arrangement and projection device |
Stefan Pinter, Johannes Baader, Andreas Duell, Frederic Njikam Njimonzie, Joerg Muchow +2 more |
2019-03-05 |
| 10175473 |
Micromirror array and method for the manufacture thereof |
Joerg Muchow, Johannes Baader |
2019-01-08 |
| 10001643 |
Micromirror device and projection device |
Johannes Baader, Andreas Duell, Frederic Njikam Njimonzie, Joerg Muchow, Helmut Grutzeck |
2018-06-19 |
| 9935077 |
Apparatus for eutectic bonding |
Ralf Hausner, Andreas Duell, Johannes Baader |
2018-04-03 |
| 9885866 |
Mirror system and projection device |
Kerrin Doessel, Johannes Baader, Frederic Njikam Njimonzie, Joerg Muchow, Frank Schatz +5 more |
2018-02-06 |
| 9764945 |
Micromechanical component and corresponding test method for a micromechanical component |
Sebastian Reiss, Simon Armbruster, Helmut Grutzeck, Joerg Muchow, Frederic Njikam Njimonzie +2 more |
2017-09-19 |
| 9725311 |
Micromechanical component having hermetic through-contacting, and method for producing a micromechanical component having a hermetic through-contacting |
Jochen Franz, Simon Armbruster, Helmut Grutzeck, Joerg Muchow, Frederic Njikam Njimonzie +3 more |
2017-08-08 |
| 9618740 |
Micromirror and manufacturing method for at least one micromirror which is situatable or situated in a micromirror device |
Simon Armbruster, Helmut Grutzeck, Joerg Muchow, Frederic Njikam Njimonzie, Johannes Baader +2 more |
2017-04-11 |
| 9490137 |
Method for structuring a layered structure from two semiconductor layers, and micromechanical component |
Simon Armbruster, Frank Fischer, Johannes Baader |
2016-11-08 |
| 9461234 |
Manufacturing method for a piezoelectric layer arrangement and corresponding piezoelectric layer arrangement |
Thomas Mayer, Juergen Butz, Jochen Tomaschko, Christof Single |
2016-10-04 |
| 9360664 |
Micromechanical component and method for producing a micromechanical component |
Simon Armbruster, Helmut Grutzeck, Frank Schatz, Joerg Muchow, Frederic Njikam Njimonzie +2 more |
2016-06-07 |
| 9179555 |
Electrical device having a lubricated joint and a method for lubricating such a joint |
Eric Ochs, Ronny Ludwig, Florian Grabmaier, Stephan Henzler, Christian Voehringer +1 more |
2015-11-03 |
| 7436076 |
Micromechanical component having an anodically bonded cap and a manufacturing method |
Heiko Stahl, Nicolaus Ulbrich |
2008-10-14 |
| 5701644 |
Method for producing self-crimping polymer bi-component fibers |
Werner Kaegi, Werner Stibal, Gunther Schaech, Gerhard Schmidt |
1997-12-30 |
