Issued Patents All Time
Showing 1–21 of 21 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11623860 | Interposer substrate, MEMS device and corresponding manufacturing method | Corinna Koepernik, Joerg Muchow, Stefan Mark | 2023-04-11 |
| 11130672 | Micromechanical device and corresponding production method | Johannes Baader, Nicolas Schorr, Stefan Pinter, Tina Steigert | 2021-09-28 |
| 11124412 | Manufacturing method for a micromechanical window structure and corresponding micromechanical window structure | Joerg Muchow, Stefan Pinter | 2021-09-21 |
| 10989913 | Micromechanical component and method for producing a micromechanical component | Andreas Finn, Frederic Njikam Njimonzie, Helmut Grutzeck, Joerg Muchow | 2021-04-27 |
| 10866407 | Micromechanical component and method for producing a micromechanical component | Daniel Maier, Joerg Muchow, Corinna Koepernik, Helmut Grutzeck, Stefan Mark +1 more | 2020-12-15 |
| 10775610 | Micromechanical actuator device and method for tilting a micromechanical actuator device | Benjamin Steuer, Frederic Njikam Njimonzie, Joerg Muchow, Stefan Pinter | 2020-09-15 |
| 10589988 | Mechanical component and manufacturing method for a mechanical component | Wolfgang Heinzelmann, Mohamad Iyad Al Dibs, Stefan Pinter, Frederic Njikam Njimonzie, Joerg Muchow +3 more | 2020-03-17 |
| 10222609 | Micromirror arrangement and projection device | Stefan Pinter, Johannes Baader, Andreas Duell, Frederic Njikam Njimonzie, Joerg Muchow +2 more | 2019-03-05 |
| 10175473 | Micromirror array and method for the manufacture thereof | Joerg Muchow, Johannes Baader | 2019-01-08 |
| 10001643 | Micromirror device and projection device | Johannes Baader, Andreas Duell, Frederic Njikam Njimonzie, Joerg Muchow, Helmut Grutzeck | 2018-06-19 |
| 9935077 | Apparatus for eutectic bonding | Ralf Hausner, Andreas Duell, Johannes Baader | 2018-04-03 |
| 9885866 | Mirror system and projection device | Kerrin Doessel, Johannes Baader, Frederic Njikam Njimonzie, Joerg Muchow, Frank Schatz +5 more | 2018-02-06 |
| 9764945 | Micromechanical component and corresponding test method for a micromechanical component | Sebastian Reiss, Simon Armbruster, Helmut Grutzeck, Joerg Muchow, Frederic Njikam Njimonzie +2 more | 2017-09-19 |
| 9725311 | Micromechanical component having hermetic through-contacting, and method for producing a micromechanical component having a hermetic through-contacting | Jochen Franz, Simon Armbruster, Helmut Grutzeck, Joerg Muchow, Frederic Njikam Njimonzie +3 more | 2017-08-08 |
| 9618740 | Micromirror and manufacturing method for at least one micromirror which is situatable or situated in a micromirror device | Simon Armbruster, Helmut Grutzeck, Joerg Muchow, Frederic Njikam Njimonzie, Johannes Baader +2 more | 2017-04-11 |
| 9490137 | Method for structuring a layered structure from two semiconductor layers, and micromechanical component | Simon Armbruster, Frank Fischer, Johannes Baader | 2016-11-08 |
| 9461234 | Manufacturing method for a piezoelectric layer arrangement and corresponding piezoelectric layer arrangement | Thomas Mayer, Juergen Butz, Jochen Tomaschko, Christof Single | 2016-10-04 |
| 9360664 | Micromechanical component and method for producing a micromechanical component | Simon Armbruster, Helmut Grutzeck, Frank Schatz, Joerg Muchow, Frederic Njikam Njimonzie +2 more | 2016-06-07 |
| 9179555 | Electrical device having a lubricated joint and a method for lubricating such a joint | Eric Ochs, Ronny Ludwig, Florian Grabmaier, Stephan Henzler, Christian Voehringer +1 more | 2015-11-03 |
| 7436076 | Micromechanical component having an anodically bonded cap and a manufacturing method | Heiko Stahl, Nicolaus Ulbrich | 2008-10-14 |
| 5701644 | Method for producing self-crimping polymer bi-component fibers | Werner Kaegi, Werner Stibal, Gunther Schaech, Gerhard Schmidt | 1997-12-30 |