Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10989913 | Micromechanical component and method for producing a micromechanical component | Andreas Finn, Helmut Grutzeck, Joerg Muchow, Rainer Straub | 2021-04-27 |
| 10775610 | Micromechanical actuator device and method for tilting a micromechanical actuator device | Benjamin Steuer, Joerg Muchow, Rainer Straub, Stefan Pinter | 2020-09-15 |
| 10222609 | Micromirror arrangement and projection device | Rainer Straub, Stefan Pinter, Johannes Baader, Andreas Duell, Joerg Muchow +2 more | 2019-03-05 |
| 10001643 | Micromirror device and projection device | Rainer Straub, Johannes Baader, Andreas Duell, Joerg Muchow, Helmut Grutzeck | 2018-06-19 |
| 9979269 | Micromechanical component and method for producing a micromechanical component | Joerg Muchow, Helmut Grutzeck, Zoltan Lestyan, Sebastian Reiss | 2018-05-22 |
| 9885866 | Mirror system and projection device | Rainer Straub, Kerrin Doessel, Johannes Baader, Joerg Muchow, Frank Schatz +5 more | 2018-02-06 |
| 9764945 | Micromechanical component and corresponding test method for a micromechanical component | Sebastian Reiss, Simon Armbruster, Helmut Grutzeck, Joerg Muchow, Johannes Baader +2 more | 2017-09-19 |
| 9725311 | Micromechanical component having hermetic through-contacting, and method for producing a micromechanical component having a hermetic through-contacting | Jochen Franz, Simon Armbruster, Helmut Grutzeck, Joerg Muchow, Andreas Duell +3 more | 2017-08-08 |
| 9618740 | Micromirror and manufacturing method for at least one micromirror which is situatable or situated in a micromirror device | Simon Armbruster, Helmut Grutzeck, Joerg Muchow, Johannes Baader, Stefan Pinter +2 more | 2017-04-11 |
| 9503673 | Micromechanical component including an integrated photodiode and a microprojector | Sebastian Reiss, Andreas Duell, Frank Fischer | 2016-11-22 |
| 9360664 | Micromechanical component and method for producing a micromechanical component | Simon Armbruster, Helmut Grutzeck, Frank Schatz, Joerg Muchow, Johannes Baader +2 more | 2016-06-07 |
| 8847336 | Micromechanical component having an inclined structure and corresponding manufacturing method | Tjalf Pirk, Stefan Pinter, Hubert Benzel, Heribert Weber, Michael Krueger +5 more | 2014-09-30 |
| 8188634 | Electrostatic drive, method for operating a micromechanical component having an electrostatic drive, and method for manufacturing an electrostatic drive | Michael Krueger, Joerg Muchow | 2012-05-29 |