Issued Patents All Time
Showing 25 most recent of 73 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9926188 | Sensor unit including a decoupling structure and manufacturing method therefor | Johannes Classen, Torsten Kramer, Jens Frey, Daniel Christoph Meisel, Christoph Schelling | 2018-03-27 |
| 9885626 | Micromechanical sensor system and corresponding manufacturing method | Frieder Haag | 2018-02-06 |
| 9632104 | Sensor, method for producing a sensor and method for mounting a sensor | Christoph Schelling | 2017-04-25 |
| 9240407 | Integrated diode array and corresponding manufacturing method | Gregor Schuermann | 2016-01-19 |
| 9082831 | Component having a via | Marcus Ahles, Jochen Reinmuth, Simon Armbruster | 2015-07-14 |
| 8901684 | Manufacturing method for a micromechanical component, corresponding composite component, and corresponding micromechanical component | Frank Henning, Armin Scharping, Christoph Schelling | 2014-12-02 |
| 8847336 | Micromechanical component having an inclined structure and corresponding manufacturing method | Tjalf Pirk, Stefan Pinter, Heribert Weber, Michael Krueger, Robert Sattler +5 more | 2014-09-30 |
| RE44995 | Method for producing a semiconductor component and a semiconductor component produced according to the method | Heribert Weber, Hans Artmann, Frank Schaefer | 2014-07-08 |
| 8759136 | Method for creating monocrystalline piezoresistors | Heribert Weber | 2014-06-24 |
| 8749013 | Sensor and method for its production | Simon Armbruster, Arnim Hoechst, Christoph Schelling, Ando Feyh | 2014-06-10 |
| 8530261 | Method for producing a component, and sensor element | Torsten Kramer, Kathrin Knese, Gregor Schuermann, Simon Armbruster, Christoph Schelling | 2013-09-10 |
| 8519494 | Method for manufacturing a micromechanical diaphragm structure having access from the rear of the substrate | Torsten Kramer, Marcus Ahles, Armin Grundmann, Kathrin Knese, Gregor Schuermann +1 more | 2013-08-27 |
| 8492850 | Method for producing a silicon substrate having modified surface properties and a silicon substrate of said type | Gerhard Lammel, Matthias Illing, Franz Laermer, Silvia Kronmueller, Paul Farber +4 more | 2013-07-23 |
| 8492855 | Micromechanical capacitive pressure transducer and production method | Gerhard Lammel, Simon Armbruster, Christoph Schelling, Joerg Brasas | 2013-07-23 |
| 8485041 | Sensor system, method for operating a sensor system, and method for manufacturing a sensor system | Marcus Ahles, Heribert Weber | 2013-07-16 |
| 8470631 | Method for manufacturing capped MEMS components | Torsten Kramer, Kathrin Knese, Karl-Heinz Kraft, Simon Armbruster | 2013-06-25 |
| 8429977 | Micromechanical pressure-sensor element and method for its production | Marcus Ahles | 2013-04-30 |
| 8405210 | Method for producing a plurality of chips and a chip produced accordingly | Torsten Kramer, Matthias Boehringer, Stefan Pinter, Matthias Illing, Frieder Haag +1 more | 2013-03-26 |
| 8389327 | Method for manufacturing chips | Torsten Kramer, Matthias Boehringer, Stefan Pinter, Matthias Illing, Frieder Haag +1 more | 2013-03-05 |
| 8318544 | Method for manufacturing a plurality of thin chips and correspondingly manufactured thin chip | Karl-Heinz Kraft, Christoph Schelling | 2012-11-27 |
| 8256299 | Pressure sensor having a cap above a first diaphragm connected to a hollow space below a second diaphragm | Michaela Mitschke | 2012-09-04 |
| 8250925 | Workpiece composite having a preform and a gel | Lutz Mueller, Roman Sellin | 2012-08-28 |
| 8232126 | Manufacturing method for a micromechanical component, corresponding composite component, and corresponding micromechanical component | Frank Henning, Armin Scharping, Christoph Schelling | 2012-07-31 |
| 8148234 | Method for manufacturing a semiconductor structure, and a corresponding Semiconductor Structure | Gerhard Lammel, Matthias Illing, Franz Laermer, Silvia Kronmueller, Paul Farber +4 more | 2012-04-03 |
| 8146439 | Sensor system and method for manufacturing a sensor system | Marcus Ahles | 2012-04-03 |