Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10281358 | Semiconductor sensor for gas concentration | Andreas Haeffelin, Harald Guenschel, Janine Riedrich-Moeller | 2019-05-07 |
| 9082831 | Component having a via | Jochen Reinmuth, Hubert Benzel, Simon Armbruster | 2015-07-14 |
| 8519494 | Method for manufacturing a micromechanical diaphragm structure having access from the rear of the substrate | Torsten Kramer, Armin Grundmann, Kathrin Knese, Hubert Benzel, Gregor Schuermann +1 more | 2013-08-27 |
| 8485041 | Sensor system, method for operating a sensor system, and method for manufacturing a sensor system | Hubert Benzel, Heribert Weber | 2013-07-16 |
| 8429977 | Micromechanical pressure-sensor element and method for its production | Hubert Benzel | 2013-04-30 |
| 8146439 | Sensor system and method for manufacturing a sensor system | Hubert Benzel | 2012-04-03 |