Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8558327 | Micromechanical component and corresponding production method | Heribert Weber, Simon Armbruster | 2013-10-15 |
| 8530261 | Method for producing a component, and sensor element | Torsten Kramer, Hubert Benzel, Gregor Schuermann, Simon Armbruster, Christoph Schelling | 2013-09-10 |
| 8519494 | Method for manufacturing a micromechanical diaphragm structure having access from the rear of the substrate | Torsten Kramer, Marcus Ahles, Armin Grundmann, Hubert Benzel, Gregor Schuermann +1 more | 2013-08-27 |
| 8470631 | Method for manufacturing capped MEMS components | Torsten Kramer, Hubert Benzel, Karl-Heinz Kraft, Simon Armbruster | 2013-06-25 |