| 12145808 |
Method and device for handling (hygiene) products |
Matthias Vocks, Andreas Prahm, Arthur Wilhelm |
2024-11-19 |
| 11208319 |
Method for manufacturing a MEMS unit for a micromechanical pressure sensor |
Arne Dannenberg, Joachim Fritz, Thomas Friedrich |
2021-12-28 |
| 10988377 |
Method for producing a stress-decoupled micromechanical pressure sensor |
Arne Dannenberg, Joachim Fritz, Thomas Friedrich |
2021-04-27 |
| 10950455 |
Method for manufacturing a semiconductor device and semiconductor device |
Zhenyu Wu, Jens Schindele |
2021-03-16 |
| 10473683 |
Sensor element for thermal anemometry |
Florian Schoen, Christian Lemier |
2019-11-12 |
| 9926188 |
Sensor unit including a decoupling structure and manufacturing method therefor |
Johannes Classen, Hubert Benzel, Jens Frey, Daniel Christoph Meisel, Christoph Schelling |
2018-03-27 |
| 9475693 |
ASIC element, in particular as a component of a vertically integrated hybrid component |
Daniel Christoph Meisel, Christoph Schelling, Jens Frey |
2016-10-25 |
| 8530261 |
Method for producing a component, and sensor element |
Kathrin Knese, Hubert Benzel, Gregor Schuermann, Simon Armbruster, Christoph Schelling |
2013-09-10 |
| 8519494 |
Method for manufacturing a micromechanical diaphragm structure having access from the rear of the substrate |
Marcus Ahles, Armin Grundmann, Kathrin Knese, Hubert Benzel, Gregor Schuermann +1 more |
2013-08-27 |
| 8470631 |
Method for manufacturing capped MEMS components |
Kathrin Knese, Hubert Benzel, Karl-Heinz Kraft, Simon Armbruster |
2013-06-25 |
| 8405210 |
Method for producing a plurality of chips and a chip produced accordingly |
Matthias Boehringer, Stefan Pinter, Hubert Benzel, Matthias Illing, Frieder Haag +1 more |
2013-03-26 |
| 8389327 |
Method for manufacturing chips |
Matthias Boehringer, Stefan Pinter, Hubert Benzel, Matthias Illing, Frieder Haag +1 more |
2013-03-05 |
| 7989263 |
Method for manufacturing a micromechanical chip and a component having a chip of this type |
Christoph Schelling, Christina Leinenbach |
2011-08-02 |
| 6827278 |
Data carrier |
Volker Timm, Ralf Malzahn, Wolfgang Eber, Dominik Berger, Jozef L. W. Kessels |
2004-12-07 |
| 6655599 |
Data carrier having reset means for interrupting the processing |
Peter Thueringer, Klaus Ully, Peter Kompan, Markus Feuser |
2003-12-02 |
