Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12145808 | Method and device for handling (hygiene) products | Matthias Vocks, Andreas Prahm, Arthur Wilhelm | 2024-11-19 |
| 11208319 | Method for manufacturing a MEMS unit for a micromechanical pressure sensor | Arne Dannenberg, Joachim Fritz, Thomas Friedrich | 2021-12-28 |
| 10988377 | Method for producing a stress-decoupled micromechanical pressure sensor | Arne Dannenberg, Joachim Fritz, Thomas Friedrich | 2021-04-27 |
| 10950455 | Method for manufacturing a semiconductor device and semiconductor device | Zhenyu Wu, Jens Schindele | 2021-03-16 |
| 10473683 | Sensor element for thermal anemometry | Florian Schoen, Christian Lemier | 2019-11-12 |
| 9926188 | Sensor unit including a decoupling structure and manufacturing method therefor | Johannes Classen, Hubert Benzel, Jens Frey, Daniel Christoph Meisel, Christoph Schelling | 2018-03-27 |
| 9475693 | ASIC element, in particular as a component of a vertically integrated hybrid component | Daniel Christoph Meisel, Christoph Schelling, Jens Frey | 2016-10-25 |
| 8530261 | Method for producing a component, and sensor element | Kathrin Knese, Hubert Benzel, Gregor Schuermann, Simon Armbruster, Christoph Schelling | 2013-09-10 |
| 8519494 | Method for manufacturing a micromechanical diaphragm structure having access from the rear of the substrate | Marcus Ahles, Armin Grundmann, Kathrin Knese, Hubert Benzel, Gregor Schuermann +1 more | 2013-08-27 |
| 8470631 | Method for manufacturing capped MEMS components | Kathrin Knese, Hubert Benzel, Karl-Heinz Kraft, Simon Armbruster | 2013-06-25 |
| 8405210 | Method for producing a plurality of chips and a chip produced accordingly | Matthias Boehringer, Stefan Pinter, Hubert Benzel, Matthias Illing, Frieder Haag +1 more | 2013-03-26 |
| 8389327 | Method for manufacturing chips | Matthias Boehringer, Stefan Pinter, Hubert Benzel, Matthias Illing, Frieder Haag +1 more | 2013-03-05 |
| 7989263 | Method for manufacturing a micromechanical chip and a component having a chip of this type | Christoph Schelling, Christina Leinenbach | 2011-08-02 |
| 6827278 | Data carrier | Volker Timm, Ralf Malzahn, Wolfgang Eber, Dominik Berger, Jozef L. W. Kessels | 2004-12-07 |
| 6655599 | Data carrier having reset means for interrupting the processing | Peter Thueringer, Klaus Ully, Peter Kompan, Markus Feuser | 2003-12-02 |