Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12365581 | Micromechanical component for a sensor or microphone device | Heribert Weber, Andreas Scheurle, Peter Schmollngruber, Sophielouise Mach, Thomas Friedrich | 2025-07-22 |
| 11905166 | Production method for a micromechanical component | Heribert Weber, Peter Schmollngruber, Thomas Friedrich, Andreas Scheurle, Sophielouise Mach | 2024-02-20 |
| 11208319 | Method for manufacturing a MEMS unit for a micromechanical pressure sensor | Arne Dannenberg, Thomas Friedrich, Torsten Kramer | 2021-12-28 |
| 10988377 | Method for producing a stress-decoupled micromechanical pressure sensor | Arne Dannenberg, Torsten Kramer, Thomas Friedrich | 2021-04-27 |
| 9195054 | Cascaded micromechanical actuator structure | Tjalf Pirk, Stefan Pinter, Joerg Muchow, Christoph Friese | 2015-11-24 |
| 8896897 | Micromechanical component and a method for operating a micromechanical component | Stefan Pinter, Joerg Muchow, Christoph Friese | 2014-11-25 |
| 8847336 | Micromechanical component having an inclined structure and corresponding manufacturing method | Tjalf Pirk, Stefan Pinter, Hubert Benzel, Heribert Weber, Michael Krueger +5 more | 2014-09-30 |
| 8629635 | Methods for operating an electrostatic drive, and electrostataic drives | Tjalf Pirk, Stefan Pinter, Christoph Friese | 2014-01-14 |
| 8581470 | Electrode comb, micromechanical component, and method for producing an electrode comb or a micromechanical component | Tjalf Pirk, Stefan Pinter, Joerg Muchow | 2013-11-12 |
| 8384975 | Micromechanical assembly having a displaceable component | Tjalf Pirk, Stefan Pinter, Christoph Friese | 2013-02-26 |
| 8179584 | Micromechanical component having a swiveling part and method for producing same | Stefan Pinter | 2012-05-15 |