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Production method for a micromechanical component |
Heribert Weber, Peter Schmollngruber, Thomas Friedrich, Andreas Scheurle, Sophielouise Mach |
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Method for manufacturing a MEMS unit for a micromechanical pressure sensor |
Arne Dannenberg, Thomas Friedrich, Torsten Kramer |
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Method for producing a stress-decoupled micromechanical pressure sensor |
Arne Dannenberg, Torsten Kramer, Thomas Friedrich |
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Cascaded micromechanical actuator structure |
Tjalf Pirk, Stefan Pinter, Joerg Muchow, Christoph Friese |
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| 8896897 |
Micromechanical component and a method for operating a micromechanical component |
Stefan Pinter, Joerg Muchow, Christoph Friese |
2014-11-25 |
| 8847336 |
Micromechanical component having an inclined structure and corresponding manufacturing method |
Tjalf Pirk, Stefan Pinter, Hubert Benzel, Heribert Weber, Michael Krueger +5 more |
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Methods for operating an electrostatic drive, and electrostataic drives |
Tjalf Pirk, Stefan Pinter, Christoph Friese |
2014-01-14 |
| 8581470 |
Electrode comb, micromechanical component, and method for producing an electrode comb or a micromechanical component |
Tjalf Pirk, Stefan Pinter, Joerg Muchow |
2013-11-12 |
| 8384975 |
Micromechanical assembly having a displaceable component |
Tjalf Pirk, Stefan Pinter, Christoph Friese |
2013-02-26 |
| 8179584 |
Micromechanical component having a swiveling part and method for producing same |
Stefan Pinter |
2012-05-15 |
