Issued Patents All Time
Showing 1–21 of 21 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12365581 | Micromechanical component for a sensor or microphone device | Heribert Weber, Andreas Scheurle, Joachim Fritz, Sophielouise Mach, Thomas Friedrich | 2025-07-22 |
| 12230457 | Method for manufacturing a MEMS switch having an embedded metal contact | Jochen Reinmuth, Matthew Lewis | 2025-02-18 |
| 12163851 | Micromechanical component for a sensor device having a capacitor sealing structure | Heribert Weber | 2024-12-10 |
| 12160215 | Method for manufacturing a piezoelectric resonator | Friedjof Heuck, Marcus Pritschow, Markus Kuhnke, Ricardo Zamora, Sebastien Loiseau +3 more | 2024-12-03 |
| 12151936 | Micromechanical component for a sensor device or microphone device | Heribert Weber, Andreas Scheurle, Christoph Hermes, Thomas Friedrich | 2024-11-26 |
| 12030773 | Method for producing a wafer connection | Friedjof Heuck, Jochen Tomaschko, Thomas Friedrich, Volkmar Senz, Franziska Rohlfing | 2024-07-09 |
| 11978658 | Method for manufacturing a polysilicon SOI substrate including a cavity | Jochen Reinmuth | 2024-05-07 |
| 11976996 | Micromechanical component for a capacitive pressure sensor device | Thomas Friedrich, Christoph Hermes, Hans Artmann, Heribert Weber, Volkmar Senz | 2024-05-07 |
| 11940345 | Micromechanical component for a capacitive pressure sensor device | Thomas Friedrich, Christoph Hermes, Hans Artmann, Heribert Weber, Volkmar Senz | 2024-03-26 |
| 11933689 | MEMS capacitive sensor including improved contact separation | Heribert Weber, Christoph Hermes, Hans Artmann, Thomas Friedrich, Volkmar Senz | 2024-03-19 |
| 11912563 | Micromechanical component and method for manufacturing a micromechanical component | Hans Artmann, Christoph Hermes, Heribert Weber, Jochen Reinmuth, Thomas Friedrich | 2024-02-27 |
| 11905166 | Production method for a micromechanical component | Heribert Weber, Thomas Friedrich, Andreas Scheurle, Joachim Fritz, Sophielouise Mach | 2024-02-20 |
| 11851324 | Method for sealing entries in a MEMS element | Christoph Hermes, Hans Artmann, Heribert Weber, Thomas Friedrich, Tobias Joachim Menold +1 more | 2023-12-26 |
| 11788912 | Micromechanical pressure sensor device including a diaphragm system and corresponding manufacturing method | Heribert Weber | 2023-10-17 |
| 11418885 | Micromechanical component for a sensor device or microphone device | Heribert Weber, Andreas Scheurle, Christoph Hermes, Thomas Friedrich | 2022-08-16 |
| 8299549 | Layer structure for electrical contacting of semiconductor components | Jochen Reinmuth, Hans Artmann | 2012-10-30 |
| 8196474 | Pressure sensor | Jochen Reinmuth, Hans Artmann | 2012-06-12 |
| 8076739 | Micromechanical component and method for producing a micromechanical component | Hans Artmann, Thomas Wagner | 2011-12-13 |
| 7312609 | GMR sensor element and its use | Ingo Herrmann, Henrik Siegle, Hartmut Kittel, Paul Farber, Ulrich May | 2007-12-25 |
| 7095596 | Magnetoresistive sensor element and method for reducing the angular error of a magnetoresistive sensor element | Ingo Herrmann, Henrik Siegle, Hartmut Kittel, Paul Farber, Ulrich May | 2006-08-22 |
| 7064649 | Magneto-resistive layer arrangement and gradiometer with said layer arrangement | Henrik Siegle | 2006-06-20 |