Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12151936 | Micromechanical component for a sensor device or microphone device | Heribert Weber, Andreas Scheurle, Peter Schmollngruber, Thomas Friedrich | 2024-11-26 |
| 11976996 | Micromechanical component for a capacitive pressure sensor device | Thomas Friedrich, Hans Artmann, Heribert Weber, Peter Schmollngruber, Volkmar Senz | 2024-05-07 |
| 11940345 | Micromechanical component for a capacitive pressure sensor device | Thomas Friedrich, Hans Artmann, Heribert Weber, Peter Schmollngruber, Volkmar Senz | 2024-03-26 |
| 11933689 | MEMS capacitive sensor including improved contact separation | Heribert Weber, Hans Artmann, Peter Schmollngruber, Thomas Friedrich, Volkmar Senz | 2024-03-19 |
| 11912563 | Micromechanical component and method for manufacturing a micromechanical component | Hans Artmann, Heribert Weber, Jochen Reinmuth, Peter Schmollngruber, Thomas Friedrich | 2024-02-27 |
| 11912565 | Micromechanical sensor unit and method for manufacturing a micromechanical sensor unit | Kerrin Doessel, Thomas Friedrich | 2024-02-27 |
| 11851324 | Method for sealing entries in a MEMS element | Hans Artmann, Heribert Weber, Peter Schmollngruber, Thomas Friedrich, Tobias Joachim Menold +1 more | 2023-12-26 |
| 11840445 | MEMS sensor including a diaphragm and method for manufacturing a MEMS sensor | Kerrin Doessel, Thomas Friedrich | 2023-12-12 |
| 11554952 | Method for closing openings in a flexible diaphragm of a MEMS element | Bernhard Gehl, Juergen Butz | 2023-01-17 |
| 11418885 | Micromechanical component for a sensor device or microphone device | Heribert Weber, Andreas Scheurle, Peter Schmollngruber, Thomas Friedrich | 2022-08-16 |
| 11012789 | MEMS microphone system | Bernhard Gehl, Arnim Hoechst, Daniel Christoph Meisel, Andrew J. Doller, Yujie Zhang +1 more | 2021-05-18 |