Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12145840 | MEMS sensor as well as method for operating a mems sensor | Mike Schwarz | 2024-11-19 |
| 11608264 | Method for manufacturing a substrate having a region mechanically decoupled from a support, method for manufacturing at least one spring, and a substrate | Mike Schwarz, Thomas Friedrich | 2023-03-21 |
| 11519803 | Method for manufacturing micromechanical diaphragm sensors | Stephan Oppl | 2022-12-06 |
| 11441964 | Micromechanical pressure sensor device and corresponding manufacturing method | Volkmar Senz, Jochen Franz | 2022-09-13 |
| 11326969 | Linearized micromechanical sensor | Stefan Zehringer, Andreas Duell, Helmut Grutzeck, Jochen Franz, Mike Schwarz +2 more | 2022-05-10 |
| 11208319 | Method for manufacturing a MEMS unit for a micromechanical pressure sensor | Joachim Fritz, Thomas Friedrich, Torsten Kramer | 2021-12-28 |
| 11060937 | Micromechanical pressure sensor | Ferenc Lukacs, Friedjof Heuck, Helmut Grutzeck, Mike Schwarz, Robert Maul +3 more | 2021-07-13 |
| 11059717 | Micromechanical pressure sensor and method for producing said micromechanical pressure sensor | Tobias Henn | 2021-07-13 |
| 10988377 | Method for producing a stress-decoupled micromechanical pressure sensor | Torsten Kramer, Joachim Fritz, Thomas Friedrich | 2021-04-27 |
| 10775253 | Method for producing a micromechanical component with an exposed pressure sensor device and micromechanical component | Heiko Stahl, Daniel Haug, Daniel Kaercher, Michaela Mitschke, Mike Schwarz +1 more | 2020-09-15 |
| 9927497 | Sensor apparatus, production method for a sensor apparatus having at least one magnetic core and method for determining a field strength of a magnetic field in at least one spatial direction | Frank Reichenbach, Sevki Gencol, Rainer Eckstein, Christian Patak, Achim Breitling +1 more | 2018-03-27 |
| 9778323 | Magnetic sensor device and manufacturing method for a magnetic sensor device | Achim Breitling, Christian Patak, Volkmar Senz, Sevki Gencol, Tamer Sinanoglu | 2017-10-03 |
| 9558880 | Microtechnical component for a magnetic sensor device or a magnetic actuator and production method for a microtechnical component for a magnetic sensor device or a magnetic actuator | Marco Schreiter | 2017-01-31 |
| 9194388 | Micro-dosing pump having a rotatable valve disk driven by a magnetized actuator disk | Franz Laermer | 2015-11-24 |