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Method for producing a plurality of sensor devices, and sensor device |
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Micromechanical pressure sensor system and method for manufacturing a micromechanical pressure sensor system |
Uwe Schiller, Lars Sodan, Michael Knauss, Robert Kuells, Sebastian Schuler-Watkins |
2022-07-26 |
| 11390519 |
Method for manufacturing a MEMS sensor |
Sebastian Schuler-Watkins, Tobias Henn |
2022-07-19 |
| 11370654 |
Device for protecting components against liquids and for ventilating the same |
Sebastian Schuler-Watkins, Michael Knauss |
2022-06-28 |
| 10775253 |
Method for producing a micromechanical component with an exposed pressure sensor device and micromechanical component |
Heiko Stahl, Arne Dannenberg, Daniel Kaercher, Michaela Mitschke, Mike Schwarz +1 more |
2020-09-15 |
| 10684185 |
Sensor and/or sound detection device and manufacturing method for a sensor and/or sound detection device |
Holger Hoefer, Jochen Reinmuth, Michael Knauss, Sebastian Schuler-Watkins |
2020-06-16 |
| 10442681 |
Micromechanical system including a sensitive element and associated manufacturing method |
Hans-Peter Baer, Mike Schwarz, Volkmar Senz |
2019-10-15 |
