Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10775253 | Method for producing a micromechanical component with an exposed pressure sensor device and micromechanical component | Heiko Stahl, Arne Dannenberg, Daniel Haug, Daniel Kaercher, Mike Schwarz +1 more | 2020-09-15 |
| 10670482 | Sensor element for a pressure sensor | Stefan Zehringer, Zoltan Lestyan, Richard Fix, Jochen Franz, Tobias Sebastian Frey | 2020-06-02 |
| 9850120 | Micromechanical component having a diaphragm | Uwe Schiller, Volkmar Senz, Jochen Franz, Helmut Grutzeck | 2017-12-26 |
| 8256299 | Pressure sensor having a cap above a first diaphragm connected to a hollow space below a second diaphragm | Hubert Benzel | 2012-09-04 |