Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12145840 | MEMS sensor as well as method for operating a mems sensor | Arne Dannenberg | 2024-11-19 |
| 11952263 | Micromechanical sensor device and corresponding manufacturing method | Pascal Gieschke, Valentina Kramer-Sinzinger | 2024-04-09 |
| 11608264 | Method for manufacturing a substrate having a region mechanically decoupled from a support, method for manufacturing at least one spring, and a substrate | Arne Dannenberg, Thomas Friedrich | 2023-03-21 |
| 11486782 | Micromechanical device and method for manufacturing a micromechanical device | Friedjof Heuck, Thomas Friedrich, Volkmar Senz | 2022-11-01 |
| 11326969 | Linearized micromechanical sensor | Stefan Zehringer, Andreas Duell, Arne Dannenberg, Helmut Grutzeck, Jochen Franz +2 more | 2022-05-10 |
| 11060937 | Micromechanical pressure sensor | Ferenc Lukacs, Arne Dannenberg, Friedjof Heuck, Helmut Grutzeck, Robert Maul +3 more | 2021-07-13 |
| 10914675 | Sensor device for measuring a fluid concentration, and use of the sensor device | Thomas Friedrich, Timon Brueckner | 2021-02-09 |
| 10775253 | Method for producing a micromechanical component with an exposed pressure sensor device and micromechanical component | Heiko Stahl, Arne Dannenberg, Daniel Haug, Daniel Kaercher, Michaela Mitschke +1 more | 2020-09-15 |
| 10442681 | Micromechanical system including a sensitive element and associated manufacturing method | Daniel Haug, Hans-Peter Baer, Volkmar Senz | 2019-10-15 |