Issued Patents All Time
Showing 25 most recent of 59 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12195330 | Method for producing a plurality of sensor devices, and sensor device | Daniel Haug, Michael Knauss, Sebastian Schuler-Watkins, Tobias Henn, Raschid Baraki | 2025-01-14 |
| 11906383 | Micromechanical sensor device having an ASIC chip integrated into a capping unit and corresponding manufacturing method | Nico Greiner | 2024-02-20 |
| 11584640 | Method for producing a micromechanical device having inclined optical windows, and corresponding micromechanical device | Benjamin Steuer | 2023-02-21 |
| 11479461 | Production method for a micromechanical device having inclined optical windows, and micromechanical device having inclined optical windows | — | 2022-10-25 |
| 11360270 | MEMS optical switch with stop control | Ning Wang, Christoph Schelling, Alexander Huebel, Hartmut Kueppers, Uma Krishnamoorthy | 2022-06-14 |
| 11340399 | In-plane MEMS optical switch | Ning Wang, Alexander Huebel, Christoph Schelling, Jan Niklas Caspers, Hartmut Kueppers | 2022-05-24 |
| 11300852 | MEMS optical switch with a cantilever coupler | Ning Wang, Alexander Huebel, Christoph Schelling, Jan Niklas Caspers, Hartmut Kueppers | 2022-04-12 |
| 11130672 | Micromechanical device and corresponding production method | Johannes Baader, Nicolas Schorr, Rainer Straub, Tina Steigert | 2021-09-28 |
| 11124412 | Manufacturing method for a micromechanical window structure and corresponding micromechanical window structure | Joerg Muchow, Rainer Straub | 2021-09-21 |
| 11066295 | Micromechanical component having an oscillator, a method for the manufacture thereof, and a method for exciting a motion of an adjustable element about a rotational axis | Philip Kaupmann, Helmut Grutzeck, Jochen Franz, Joerg Muchow | 2021-07-20 |
| 10996461 | Protective wafer including inclined optical windows and device | — | 2021-05-04 |
| 10840107 | Method for forming a cavity and a component having a cavity | Simon Armbruster, Benjamin Steuer, Dietmar Haberer, Jochen Tomaschko | 2020-11-17 |
| 10775610 | Micromechanical actuator device and method for tilting a micromechanical actuator device | Benjamin Steuer, Frederic Njikam Njimonzie, Joerg Muchow, Rainer Straub | 2020-09-15 |
| 10690906 | Magnetic actuator | Joerg Muchow, Frank Schatz | 2020-06-23 |
| 10663624 | Method for creating a nanostructure in a transparent substrate | — | 2020-05-26 |
| 10627617 | Micromechanical constituent and method for adjusting an adjustable element | Frank Schatz, Joerg Muchow, Mirko Hattass, Thorsten Balslink | 2020-04-21 |
| 10591721 | Method for manufacturing a protective wafer including inclined optical windows and device | — | 2020-03-17 |
| 10589988 | Mechanical component and manufacturing method for a mechanical component | Wolfgang Heinzelmann, Mohamad Iyad Al Dibs, Rainer Straub, Frederic Njikam Njimonzie, Joerg Muchow +3 more | 2020-03-17 |
| 10431474 | Method for forming a cavity and a component having a cavity | Simon Armbruster, Benjamin Steuer, Dietmar Haberer, Jochen Tomaschko | 2019-10-01 |
| 10222609 | Micromirror arrangement and projection device | Rainer Straub, Johannes Baader, Andreas Duell, Frederic Njikam Njimonzie, Joerg Muchow +2 more | 2019-03-05 |
| 10012828 | Assembly body for micromirror chips, mirror device and production method for a mirror device | Frank Schatz, Friedjof Heuck, Kerrin Doessel, Daniel Pantel, Franziska Rohlfing | 2018-07-03 |
| 9791663 | Magnetically drivable micromirror | Heribert Weber, Frank Fischer, Michael Krueger, Joerg Muchow, Christoph Friese | 2017-10-17 |
| 9663351 | Method for producing a wafer equipped with transparent plates | Simon Armbruster, Dietmar Haberer, Jochen Tomaschko, Benjamin Steuer | 2017-05-30 |
| 9618740 | Micromirror and manufacturing method for at least one micromirror which is situatable or situated in a micromirror device | Simon Armbruster, Helmut Grutzeck, Joerg Muchow, Frederic Njikam Njimonzie, Johannes Baader +2 more | 2017-04-11 |
| 9195054 | Cascaded micromechanical actuator structure | Tjalf Pirk, Joerg Muchow, Joachim Fritz, Christoph Friese | 2015-11-24 |