Issued Patents All Time
Showing 26–50 of 59 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9052510 | Micromechanical component and manufacturing method for a micromechanical component | Steffi Lindenkreuz, Gerhard Kiesewetter, Joerg Muchow | 2015-06-09 |
| 9045331 | Micromechanical component and method for producing a micromechanical component | Heiko Nitsche, Wolfram Schock, Joerg Muchow, Christoph Friese | 2015-06-02 |
| 8981500 | Method for producing an optical window device for a MEMS device | — | 2015-03-17 |
| 8896897 | Micromechanical component and a method for operating a micromechanical component | Joerg Muchow, Joachim Fritz, Christoph Friese | 2014-11-25 |
| 8847336 | Micromechanical component having an inclined structure and corresponding manufacturing method | Tjalf Pirk, Hubert Benzel, Heribert Weber, Michael Krueger, Robert Sattler +5 more | 2014-09-30 |
| 8736934 | Assembly having a displaceable part and method for operating an assembly having a displaceable part | — | 2014-05-27 |
| 8699115 | Production method for a micromechanical component, and a micromechanical component | Christoph Friese | 2014-04-15 |
| 8648433 | Method for producing oblique surfaces in a substrate and wafer having an oblique surface | — | 2014-02-11 |
| 8629635 | Methods for operating an electrostatic drive, and electrostataic drives | Tjalf Pirk, Joachim Fritz, Christoph Friese | 2014-01-14 |
| 8581470 | Electrode comb, micromechanical component, and method for producing an electrode comb or a micromechanical component | Tjalf Pirk, Joerg Muchow, Joachim Fritz | 2013-11-12 |
| 8550639 | Cover device for a micro-optomechanical component, and manufacturing method for such a cover device | — | 2013-10-08 |
| 8462415 | Connecting structure for micromechanical oscillating devices | Andreas Duell, Joerg Muchow, Zoltan Lestyan | 2013-06-11 |
| 8405210 | Method for producing a plurality of chips and a chip produced accordingly | Torsten Kramer, Matthias Boehringer, Hubert Benzel, Matthias Illing, Frieder Haag +1 more | 2013-03-26 |
| 8389327 | Method for manufacturing chips | Torsten Kramer, Matthias Boehringer, Hubert Benzel, Matthias Illing, Frieder Haag +1 more | 2013-03-05 |
| 8384975 | Micromechanical assembly having a displaceable component | Tjalf Pirk, Joachim Fritz, Christoph Friese | 2013-02-26 |
| 8344831 | Magnetic yoke, micromechanical component and method for producing a magnetic yoke and a micromechanical component | Joerg Muchow, Juergen Kober | 2013-01-01 |
| 8179584 | Micromechanical component having a swiveling part and method for producing same | Joachim Fritz | 2012-05-15 |
| 7992442 | Component and method for its manufacture | — | 2011-08-09 |
| 7843620 | Micromirror system | — | 2010-11-30 |
| 7740459 | Micropump having a pump diaphragm and a polysilicon layer | Matthias Fuertsch, Hubert Benzel, Stefan Finkbeiner, Frank Fischer, Heiko Stahl +1 more | 2010-06-22 |
| 7299818 | Integrated microvalve and method for manufacturing a microvalve | Tjalf Pirk | 2007-11-27 |
| 7273764 | Sensor with at least one micromechanical structure, and method for producing it | Frank Reichenbach, Frank Henning, Hans Artmann, Helmut Baumann, Franz Laemer +2 more | 2007-09-25 |
| 7148077 | Micromechanical structural element having a diaphragm and method for producing such a structural element | Matthias Fuertsch, Heribert Weber, Frank Fischer, Lars Metzger, Christoph Schelling +1 more | 2006-12-12 |
| 7073400 | Sensor for measuring pressure in a sealed volume | Hubert Benzel, Helmut Grutzeck | 2006-07-11 |
| 7059186 | Integrated flow sensor for measuring a fluid flow | Tjalf Pirk | 2006-06-13 |