Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7740459 | Micropump having a pump diaphragm and a polysilicon layer | Hubert Benzel, Stefan Finkbeiner, Stefan Pinter, Frank Fischer, Heiko Stahl +1 more | 2010-06-22 |
| 7279759 | Membrane sensor | Roland Muller-Fiedler, Hans Hecht, Joerg Muchow, Andreas Stratmann, Heribert Weber +6 more | 2007-10-09 |
| 7148077 | Micromechanical structural element having a diaphragm and method for producing such a structural element | Stefan Pinter, Heribert Weber, Frank Fischer, Lars Metzger, Christoph Schelling +1 more | 2006-12-12 |
| 7060197 | Micromechanical mass flow sensor and method for the production thereof | Frank Fischer, Lars Metzger, Frieder Sundermeier | 2006-06-13 |
| 7025163 | Device for detecting a deformation of a component | Gerd Lorenz | 2006-04-11 |
| 6523403 | Mass flow sensor | Heribert Weber | 2003-02-25 |
| 6251699 | Method for fabricating micromechanical components | Michael Offenberg | 2001-06-26 |
| 5851922 | Process for fabricating a device using nitrogen implantation into silicide layer | Joze Bevk, George E. Georgiou, Steven J. Hillenius | 1998-12-22 |