Issued Patents All Time
Showing 25 most recent of 37 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8627719 | Micromechanical sensor element, method for manufacturing a micromechanical sensor element and method for operating a micromechanical sensor element | Michael Baus | 2014-01-14 |
| 7273764 | Sensor with at least one micromechanical structure, and method for producing it | Frank Reichenbach, Stefan Pinter, Frank Henning, Hans Artmann, Helmut Baumann +2 more | 2007-09-25 |
| 7259436 | Micromechanical component and corresponding production method | Markus Lutz | 2007-08-21 |
| 6936902 | Sensor with at least one micromechanical structure and method for production thereof | Frank Reichenbach, Stefan Pinter, Frank Henning, Hans Artmann, Helmut Baumann +2 more | 2005-08-30 |
| 6558559 | Method of manufacturing micromechanical surface structures by vapor-phase etching | Volker Becker, Franz Laermer, Andrea Schilp | 2003-05-06 |
| 6368885 | Method for manufacturing a micromechanical component | Udo Bischof | 2002-04-09 |
| 6318175 | Micromechanical sensor and method for the manufacture thereof | Joerg Muchow, Horst Muenzel, Winfried Waldvogel | 2001-11-20 |
| 6268232 | Method for fabricating a micromechanical component | Helmut Skapa, Horst Muenzel, Franz Laermer, Heinz-Georg Vossenberg | 2001-07-31 |
| 6251699 | Method for fabricating micromechanical components | Matthias Fuertsch | 2001-06-26 |
| 6214243 | Process for producing a speed of rotation coriolis sensor | Horst Muenzel, Franz Laermer, Andrea Schilp, Markus Lutz | 2001-04-10 |
| 6187607 | Manufacturing method for micromechanical component | Udo Bischof, Markus Lutz | 2001-02-13 |
| 6140709 | Bonding pad structure and method for manufacturing the bonding pad structure | Horst Muenzel, Udo Bischof, Eckhard Graf, Markus Lutz | 2000-10-31 |
| 6117701 | Method for manufacturing a rate-of-rotation sensor | Nicholas Ian Buchan, Horst Muenzel, Franz Laermer, Udo Bischof, Markus Lutz | 2000-09-12 |
| 6076404 | Micromechanical sensor including a single-crystal silicon support | Joerg Muchow, Horst Muenzel, Winfried Waldvogel | 2000-06-20 |
| 6055858 | Acceleration sensor | Horst Muenzel, Dietrich Schubert, Alexandra Boehringer, Klaus Heyers, Markus Lutz | 2000-05-02 |
| 6030850 | Method for manufacturing a sensor | Juergen Kurle, Karsten Funk, Franz Laermer, Andrea Schilp | 2000-02-29 |
| 5983721 | Micromechanical component having closely spaced apart anchoring areas for a surface structure disposed thereon | Peter Sulzberger | 1999-11-16 |
| 5959208 | Acceleration sensor | Horst Muenzel, Dietrich Schubert, Alexandra Boehringer, Klaus Heyers, Markus Lutz | 1999-09-28 |
| 5937275 | Method of producing acceleration sensors | Horst Munzel, Klaus Heyers, Bernhard Elsner, Markus Lutz, Helmut Skapa +3 more | 1999-08-10 |
| 5792675 | Method for manufacturing an accelerometer sensor of crystalline material | — | 1998-08-11 |
| 5756901 | Sensor and method for manufacturing a sensor | Juergen Kurle, Karsten Funk, Franz Laermer, Andrea Schilp | 1998-05-26 |
| 5723353 | Process for manufacturing a sensor | Horst Muenzel, Dietrich Schubert, Alexandra Boehringer, Klaus Heyers, Markus Lutz | 1998-03-03 |
| 5683591 | Process for producing surface micromechanical structures | — | 1997-11-04 |
| 5646347 | Suspension for micromechanical structure and micromechanical acceleration sensor | Kurt Weiblen, Bernhard Elsner | 1997-07-08 |
| 5631422 | Sensor comprising multilayer substrate | Peter Sulzberger, Bernhard Elsner, Markus Lutz | 1997-05-20 |