Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9239339 | Acceleration sensor and method for operating an acceleration sensor | Rolf Kaack, Harald Emmerich, Patrick Wellner | 2016-01-19 |
| 8429971 | Multiaxial micromechanical acceleration sensor | Johannes Classen, Axel Franke, Kersten Kehr, Ralf Reichenbach | 2013-04-30 |
| 8393215 | Micromechanical acceleration sensor having an open seismic mass | Heiko Stahl, Lars Tebje | 2013-03-12 |
| 8336382 | Acceleration sensor and method for its manufacture | Johannes Classen, Arnd Kaelberer, Patrick Wellner, Lars Tebje | 2012-12-25 |
| 7878061 | Micromechanical system including a suspension and an electrode positioned movably | Johannes Classen, Arnd Kaelberer, Patrick Wellner, Lars Tebje | 2011-02-01 |
| 6634232 | Acceleration sensor with limited movability in the vertical direction | Rasmus Rettig, Oliver Kohn, Frank Fischer | 2003-10-21 |
| 6360605 | Micromechanical device | Stefan Pinter, Martin Schoefthaler, Matthias Illing, Ralf Schellin, Helmut Baumann +2 more | 2002-03-26 |
| 6318177 | Micromechanical component and method for producing the micromechanical component | Nicholas Ian Buchan, Michael Fehrenbach | 2001-11-20 |
| 6272926 | Micromechanical component | Michael Fehrenbach, Heinz-Georg Vossenberg | 2001-08-14 |
| 6106735 | Wafer stack and method of producing sensors | Jurgen Kurle, Kurt Weiblen, Stefan Pinter, Horst Muenzel, Helmut Baumann +2 more | 2000-08-22 |
| 6055858 | Acceleration sensor | Horst Muenzel, Alexandra Boehringer, Michael Offenberg, Klaus Heyers, Markus Lutz | 2000-05-02 |
| 5959208 | Acceleration sensor | Horst Muenzel, Alexandra Boehringer, Michael Offenberg, Klaus Heyers, Markus Lutz | 1999-09-28 |
| 5723353 | Process for manufacturing a sensor | Horst Muenzel, Alexandra Boehringer, Michael Offenberg, Klaus Heyers, Markus Lutz | 1998-03-03 |
| 5461917 | Acceleration sensor | Jiri Marek, Helmut Baumann, Horst Muenzel, Michael Offenberg, Martin Willmann | 1995-10-31 |