Issued Patents All Time
Showing 1–20 of 20 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10914937 | Pivot apparatus for a micromirror, and illumination apparatus having a pivot apparatus for a micromirror | Johannes Classen, Ralf Noltemeyer, Peter Sudy, Hans Artmann | 2021-02-09 |
| 10427937 | Method for producing a multilayer MEMS component, and corresponding multilayer MEMS component | Christian Zielke, Hans Artmann, Oliver Breitschaedel, Peter Borwin Staffeld | 2019-10-01 |
| 10020169 | Etching device and etching method | Christian Zielke, Hans Artmann, Oliver Breitschaedel, Peter Borwin Staffeld | 2018-07-10 |
| 9958348 | Micromechanical pressure sensor device and corresponding manufacturing method | Johannes Classen, Jochen Reinmuth | 2018-05-01 |
| 9932223 | Method for manufacturing microelectromechanical structures in a layer sequence and a corresponding electronic component having a microelectromechanical structure | Hans Artmann, Christian Zielke, Oliver Breitschaedel, Peter Borwin Staffeld | 2018-04-03 |
| 9790084 | Micromechanical sensor device | Jochen Reinmuth | 2017-10-17 |
| 9709451 | Micromechanical pressure sensor device and corresponding manufacturing method | Jochen Reinmuth, Johannes Classen | 2017-07-18 |
| 9606141 | Micromechanical sensor device | Jens Frey, Jochen Reinmuth, Johannes Classen | 2017-03-28 |
| 9156675 | Micromechanical component and manufacturing method for a micromechanical component | Jochen Reinmuth, Johannes Classen | 2015-10-13 |
| 9097736 | Micromechanical component and method for manufacturing a micromechanical component | Johannes Classen, Lars Tebje | 2015-08-04 |
| 8573059 | Acceleration sensor having an electrode bridge | Lars Tebje, Christian Bierhoff | 2013-11-05 |
| 8461833 | Method for determining the sensitivity of an acceleration sensor or magnetic field sensor | Johannes Classen, Hans-Joerg Faisst, Axel Franke, Mirko Hattass, Holger Rank +4 more | 2013-06-11 |
| 8336382 | Acceleration sensor and method for its manufacture | Johannes Classen, Patrick Wellner, Dietrich Schubert, Lars Tebje | 2012-12-25 |
| 8298962 | Device made of single-crystal silicon | Helmut Baumann, Roland Scheuerer, Heribert Weber | 2012-10-30 |
| 8272268 | Triaxial acceleration sensor | Johannes Classen, Lars Tebje | 2012-09-25 |
| 7919346 | Micromechanical component and manufacturing method | Jens Frey | 2011-04-05 |
| 7878061 | Micromechanical system including a suspension and an electrode positioned movably | Johannes Classen, Patrick Wellner, Dietrich Schubert, Lars Tebje | 2011-02-01 |
| 7834452 | Device made of single-crystal silicon | Helmut Baumann, Roland Scheuerer, Heribert Weber | 2010-11-16 |
| 7495328 | Micromechanical component | Frank Reichenbach, Freider Haag | 2009-02-24 |
| 7081592 | Micromechanical switch | — | 2006-07-25 |