Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11084714 | Method for setting a pressure in a cavity formed with the aid of a substrate and a substrate cap, and system | Achim Kronenberger, Rafel Ferre I Tomas | 2021-08-10 |
| 10427937 | Method for producing a multilayer MEMS component, and corresponding multilayer MEMS component | Arnd Kaelberer, Christian Zielke, Hans Artmann, Oliver Breitschaedel | 2019-10-01 |
| 10020169 | Etching device and etching method | Arnd Kaelberer, Christian Zielke, Hans Artmann, Oliver Breitschaedel | 2018-07-10 |
| 9932223 | Method for manufacturing microelectromechanical structures in a layer sequence and a corresponding electronic component having a microelectromechanical structure | Hans Artmann, Arnd Kaelberer, Christian Zielke, Oliver Breitschaedel | 2018-04-03 |