Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10427937 | Method for producing a multilayer MEMS component, and corresponding multilayer MEMS component | Arnd Kaelberer, Christian Zielke, Hans Artmann, Peter Borwin Staffeld | 2019-10-01 |
| 10020169 | Etching device and etching method | Arnd Kaelberer, Christian Zielke, Hans Artmann, Peter Borwin Staffeld | 2018-07-10 |
| 9932223 | Method for manufacturing microelectromechanical structures in a layer sequence and a corresponding electronic component having a microelectromechanical structure | Hans Artmann, Arnd Kaelberer, Christian Zielke, Peter Borwin Staffeld | 2018-04-03 |