Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11958740 | Method for producing a microelectromechanical sensor and microelectromechanical sensor | — | 2024-04-16 |
| 11084714 | Method for setting a pressure in a cavity formed with the aid of a substrate and a substrate cap, and system | Peter Borwin Staffeld, Rafel Ferre I Tomas | 2021-08-10 |