Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9309107 | Micromechanical system and corresponding manufacturing method | Jochen Reinmuth, Andreas Scheurle | 2016-04-12 |
| 8573059 | Acceleration sensor having an electrode bridge | Arnd Kaelberer, Lars Tebje | 2013-11-05 |
| 8530982 | Micromechanical structure, method for manufacturing a micromechanical structure, and use of a micromechanical structure | Johannes Classen | 2013-09-10 |
| 8443671 | Micromechanical structure and method for manufacturing a micromechanical structure | Johannes Classen | 2013-05-21 |