Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8564078 | Method for producing a micromechanical component having a trench structure for backside contact | Heribert Weber, Eckhard Graf | 2013-10-22 |
| 8419957 | Method for producing a micromechanical component having a filler layer and a masking layer | Heribert Weber, Eckhard Graf | 2013-04-16 |
| 8298962 | Device made of single-crystal silicon | Arnd Kaelberer, Helmut Baumann, Heribert Weber | 2012-10-30 |
| 8181522 | Capacitive acceleration sensor having a movable mass and a spring element | Heribert Weber | 2012-05-22 |
| 8174082 | Micromechanical component having multiple caverns, and manufacturing method | Frank Fischer, Eckhard Graf, Heiko Stahl, Hartmut Kueppers | 2012-05-08 |
| 8138006 | Method for producing a micromechanical component having a trench structure for backside contact | Heribert Weber, Eckhard Graf | 2012-03-20 |
| 7834452 | Device made of single-crystal silicon | Arnd Kaelberer, Helmut Baumann, Heribert Weber | 2010-11-16 |