Issued Patents All Time
Showing 1–21 of 21 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11261082 | Micromechanical device and method for manufacturing a micromechanical device | Holger Rumpf, Jens Frey, Jochen Reinmuth, Kurt-Ulrich Ritzau, Achim Breitling | 2022-03-01 |
| 10752498 | MEMS component having two different internal pressures | Achim Breitling, Jens Frey, Jochen Reinmuth, Mawuli Ametowobla | 2020-08-25 |
| 8975118 | Component having a via and method for manufacturing it | Julian Gonska, Jens Frey, Heribert Weber, Roman Schlosser | 2015-03-10 |
| 8748998 | Sensor module | Jens Frey, Heribert Weber | 2014-06-10 |
| 8647961 | Method for filling cavities in wafers, correspondingly filled blind hole and wafer having correspondingly filled insulation trenches | Jens Frey, Heribert Weber, Roman Schlosser | 2014-02-11 |
| 8587095 | Method for establishing and closing a trench of a semiconductor component | Jochen Reinmuth | 2013-11-19 |
| 8564078 | Method for producing a micromechanical component having a trench structure for backside contact | Roland Scheuerer, Heribert Weber | 2013-10-22 |
| 8419957 | Method for producing a micromechanical component having a filler layer and a masking layer | Roland Scheuerer, Heribert Weber | 2013-04-16 |
| 8174082 | Micromechanical component having multiple caverns, and manufacturing method | Frank Fischer, Heiko Stahl, Hartmut Kueppers, Roland Scheuerer | 2012-05-08 |
| 8138006 | Method for producing a micromechanical component having a trench structure for backside contact | Roland Scheuerer, Heribert Weber | 2012-03-20 |
| 7294894 | Micromechanical cap structure and a corresponding production method | Frank Fischer, Peter Hein | 2007-11-13 |
| 7153718 | Micromechanical component as well as a method for producing a micromechanical component | Frank Fischer, Peter Hein | 2006-12-26 |
| 6955975 | Method for joining a silicon plate to a second plate | Frank Reichenbach, Frank Fischer, Ralf Hausner, Frieder Haag, Markus Lutz | 2005-10-18 |
| 6951824 | Method for manufacturing a micromechanical component and a component that is manufactured in accordance with the method | Frank Fischer, Peter Hein | 2005-10-04 |
| 6876048 | Micromechanical component as well as a method for producing a micromechanical component | Frank Fischer, Peter Hein | 2005-04-05 |
| 6465854 | Micromechanical component | Horst Muenzel, Helmut Baumann | 2002-10-15 |
| 6406979 | Method for sectioning a substrate wafer into a plurality of substrate chips | Frank Fischer | 2002-06-18 |
| 6140709 | Bonding pad structure and method for manufacturing the bonding pad structure | Horst Muenzel, Michael Offenberg, Udo Bischof, Markus Lutz | 2000-10-31 |
| 5937275 | Method of producing acceleration sensors | Horst Munzel, Michael Offenberg, Klaus Heyers, Bernhard Elsner, Markus Lutz +3 more | 1999-08-10 |
| 5769459 | Inside sealing device sleeve for insertion of pipes | Juergen Graf | 1998-06-23 |
| 5465758 | Apparatus for sealing leakage points in pipes from the inside of the pipe, and a method of sealing the leakage points | Jurgen Graf, Hubert Mauz | 1995-11-14 |