Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11261082 | Micromechanical device and method for manufacturing a micromechanical device | Eckhard Graf, Holger Rumpf, Jens Frey, Jochen Reinmuth, Achim Breitling | 2022-03-01 |