Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8975118 | Component having a via and method for manufacturing it | Julian Gonska, Jens Frey, Heribert Weber, Eckhard Graf | 2015-03-10 |
| 8647961 | Method for filling cavities in wafers, correspondingly filled blind hole and wafer having correspondingly filled insulation trenches | Jens Frey, Heribert Weber, Eckhard Graf | 2014-02-11 |
| 8207585 | Method for producing a micromechanical component and mircomechanical component | Heribert Weber, Christoph Schelling | 2012-06-26 |
| 7902615 | Micromechanical structure for receiving and/or generating acoustic signals, method for producing a micromechanical structure, and use of a micromechanical structure | Stefan Weiss, Frank Fischer, Christoph Schelling | 2011-03-08 |