Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11851324 | Method for sealing entries in a MEMS element | Christoph Hermes, Hans Artmann, Heribert Weber, Peter Schmollngruber, Thomas Friedrich +1 more | 2023-12-26 |
| 11084716 | Stress reduction during laser resealing through a temperature increase | Julia Amthor, Philip Kappe | 2021-08-10 |
| 10793428 | Sensor element having laser-activated getter material | Achim Breitling | 2020-10-06 |
| 10752498 | MEMS component having two different internal pressures | Achim Breitling, Eckhard Graf, Jens Frey, Jochen Reinmuth | 2020-08-25 |
| 10556789 | Laser resealing with stress-reducing prestructuring | Frank Reichenbach, Jochen Reinmuth, Philip Kappe | 2020-02-11 |
| 10207366 | Laser reseal including optimized intensity distribution | Alexander Ilin, Jochen Reinmuth, Philip Kappe | 2019-02-19 |
| 10017375 | Structures for reducing and preventing stress and tensions during processing of silicon with the aid of melting by a laser | Frank Reichenbach, Till Schade, Jochen Reinmuth, Philip Kappe, Alexander Ilin +1 more | 2018-07-10 |
| 9919919 | Laser reseal including an additional layer and alloy formation | Jens Frey, Jochen Reinmuth, Philip Kappe | 2018-03-20 |
| 9914640 | Targeted control of the absorption behavior during laser resealing | Philip Kappe | 2018-03-13 |
| 9862597 | Laser beam deflection for targeted energy deposition | Philip Kappe | 2018-01-09 |