| 7166536 |
Methods for plasma etching of silicon |
Franz Laermer, Andrea Schilp |
2007-01-23 |
| 6897775 |
Sensor, sensor system, and method for remotely sensing a variable |
Henry Heidemeyer |
2005-05-24 |
| 6888471 |
Sensor system for detecting dimensional variables to be measured on a rotating object |
Henry Heidemeyer |
2005-05-03 |
| 6724023 |
Field effect transistor, especially for use as a sensor element or acceleration sensor |
Klaus Heyers |
2004-04-20 |
| 6724290 |
Microcoil |
Markus Ohnmacht |
2004-04-20 |
| 6514670 |
Method for designing and manufacturing a micromechanical device |
Josef Hirtreiter |
2003-02-04 |
| 6360604 |
Acceleration sensor |
Franz Laermer, Wilhelm Frey |
2002-03-26 |
| 6290858 |
Manufacturing method for a micromechanical device |
Josef Hirtreiter |
2001-09-18 |
| 6030515 |
Method for fabricating metal micropatterns |
Klaus Heyers |
2000-02-29 |
| 5996409 |
Acceleration sensing device |
Karsten Funk, Franz Laermer, Wilhelm Frey |
1999-12-07 |
| 5937275 |
Method of producing acceleration sensors |
Horst Munzel, Michael Offenberg, Klaus Heyers, Markus Lutz, Helmut Skapa +3 more |
1999-08-10 |
| 5646347 |
Suspension for micromechanical structure and micromechanical acceleration sensor |
Kurt Weiblen, Michael Offenberg |
1997-07-08 |
| 5631422 |
Sensor comprising multilayer substrate |
Peter Sulzberger, Michael Offenberg, Markus Lutz |
1997-05-20 |
