Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6656368 | Nonstick layer for a micromechanical component | Martin Schoefthaler, Peter Hein, Horst Muenzel | 2003-12-02 |
| 6268232 | Method for fabricating a micromechanical component | Horst Muenzel, Franz Laermer, Michael Offenberg, Heinz-Georg Vossenberg | 2001-07-31 |
| 5937275 | Method of producing acceleration sensors | Horst Munzel, Michael Offenberg, Klaus Heyers, Bernhard Elsner, Markus Lutz +3 more | 1999-08-10 |