Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6656368 | Nonstick layer for a micromechanical component | Peter Hein, Helmut Skapa, Horst Muenzel | 2003-12-02 |
| 6520017 | Micromechanical spin angular acceleration sensor | Harald Emmerich | 2003-02-18 |
| 6462566 | Sensor element | Ralf Schellin, Bernd Maihoefer, Franz Laermer, Markus Lutz, Harald Emmerich +1 more | 2002-10-08 |
| 6360605 | Micromechanical device | Stefan Pinter, Matthias Illing, Ralf Schellin, Helmut Baumann, Michael Fehrenbach +2 more | 2002-03-26 |
| 6215318 | Micromechanical magnetic field sensor | Ralf Schellin, Harald Emmerich, Joerg Kaienburg | 2001-04-10 |