Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9239339 | Acceleration sensor and method for operating an acceleration sensor | Rolf Kaack, Dietrich Schubert, Patrick Wellner | 2016-01-19 |
| 8786419 | Method for controlling a device and a device for controlling the device | Markus Ulm, Mathias Reimann, Udo-Martin Gomez, Emma Abel | 2014-07-22 |
| 8752431 | Acceleration sensor method for operating an acceleration sensor | Jochen Reinmuth | 2014-06-17 |
| 8426930 | Sensor module | Martin Holzmann, Christian Ohl | 2013-04-23 |
| 7555929 | Micromechanical sensor having fault identification | Dirk Droste | 2009-07-07 |
| 7323766 | Sensor module | Kurt Weiblen, Franz Schmich, Klaus Offterdinger, Hansjoerg Beutel, Johann Wehrmann +1 more | 2008-01-29 |
| 6520017 | Micromechanical spin angular acceleration sensor | Martin Schoefthaler | 2003-02-18 |
| 6462392 | Micromechanical cap structure and the respective manufacturing method | Stefan Pinter, Hans-Peter Trah, Helmut Baumann | 2002-10-08 |
| 6462566 | Sensor element | Martin Schoefthaler, Ralf Schellin, Bernd Maihoefer, Franz Laermer, Markus Lutz +1 more | 2002-10-08 |
| 6215318 | Micromechanical magnetic field sensor | Martin Schoefthaler, Ralf Schellin, Joerg Kaienburg | 2001-04-10 |
| 5908719 | Radiation mask adapted to be aligned with a photoresist layer and method of making the same | Henry Guckel, Jonathan L. Klein | 1999-06-01 |
| 5866281 | Alignment method for multi-level deep x-ray lithography utilizing alignment holes and posts | Henry Guckel, Jonathan L. Klein | 1999-02-02 |