Issued Patents All Time
Showing 1–25 of 28 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6607305 | Bi-directional micromechanical latching linear actuator | Kevin J. Fischer, Yogesh B. Gianchandani | 2003-08-19 |
| 6133615 | Photodiode arrays having minimized cross-talk between diodes | Shamus McNamara | 2000-10-17 |
| 6087743 | Position control system for use with micromechanical actuators | Eric Stiers | 2000-07-11 |
| 5908719 | Radiation mask adapted to be aligned with a photoresist layer and method of making the same | Harald Emmerich, Jonathan L. Klein | 1999-06-01 |
| 5866281 | Alignment method for multi-level deep x-ray lithography utilizing alignment holes and posts | Harald Emmerich, Jonathan L. Klein | 1999-02-02 |
| 5808384 | Single coil bistable, bidirectional micromechanical actuator | Ned Tabat | 1998-09-15 |
| 5718618 | Lapping and polishing method and apparatus for planarizing photoresist and metal microstructure layers | Pawitterjit S. Mangat | 1998-02-17 |
| 5679502 | Method and apparatus for micromachining using hard X-rays | David Peter Siddons, Erik D. Johnson, Jonathan L. Klein | 1997-10-21 |
| 5644177 | Micromechanical magnetically actuated devices | Jonathan L. Klein, Thomas L. Earles | 1997-07-01 |
| 5576147 | Formation of microstructures using a preformed photoresist sheet | Todd R. Christenson, Kenneth James Skrobis | 1996-11-19 |
| 5559358 | Opto-electro-mechanical device or filter, process for making, and sensors made therefrom | David William Burns, James D. Zook | 1996-09-24 |
| 5496668 | Formation of microstructures using a preformed photoresist sheet | Todd R. Christenson, Kenneth James Skrobis | 1996-03-05 |
| 5378583 | Formation of microstructures using a preformed photoresist sheet | Todd R. Christenson, Kenneth James Skrobis | 1995-01-03 |
| 5357807 | Micromachined differential pressure transducers | Todd Christensen | 1994-10-25 |
| 5327033 | Micromechanical magnetic devices | Todd R. Christenson, Kenneth James Skrobis | 1994-07-05 |
| 5206983 | Method of manufacturing micromechanical devices | Todd R. Christenson, Kenneth James Skrobis | 1993-05-04 |
| 5189777 | Method of producing micromachined differential pressure transducers | Todd R. Christenson | 1993-03-02 |
| 5190637 | Formation of microstructures by multiple level deep X-ray lithography with sacrificial metal layers | — | 1993-03-02 |
| 5188983 | Polysilicon resonating beam transducers and method of producing the same | Jeffry J. Sniegowski | 1993-02-23 |
| 5090254 | Polysilicon resonating beam transducers | Jeffry J. Sniegowski | 1992-02-25 |
| 5013693 | Formation of microstructures with removal of liquid by freezing and sublimation | Jeffry J. Sniegowski | 1991-05-07 |
| 4996082 | Sealed cavity semiconductor pressure transducers and method of producing the same | David William Burns | 1991-02-26 |
| 4897360 | Polysilicon thin film process | David William Burns | 1990-01-30 |
| 4853669 | Sealed cavity semiconductor pressure transducers and method of producing the same | David William Burns | 1989-08-01 |
| 4744863 | Sealed cavity semiconductor pressure transducers and method of producing the same | David William Burns | 1988-05-17 |