Issued Patents All Time
Showing 26–28 of 28 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4658279 | Velocity saturated strain sensitive semiconductor devices | — | 1987-04-14 |
| 4234361 | Process for producing an electrostatically deformable thin silicon membranes utilizing a two-stage diffusion step to form an etchant resistant layer | Steven T. Larsen | 1980-11-18 |
| 4203128 | Electrostatically deformable thin silicon membranes | Steven T. Larsen | 1980-05-13 |