Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4234361 | Process for producing an electrostatically deformable thin silicon membranes utilizing a two-stage diffusion step to form an etchant resistant layer | Henry Guckel | 1980-11-18 |
| 4203128 | Electrostatically deformable thin silicon membranes | Henry Guckel | 1980-05-13 |