Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6061137 | In-situ endpoint detection for membrane formation | William J. Dauksher | 2000-05-09 |
| 5718618 | Lapping and polishing method and apparatus for planarizing photoresist and metal microstructure layers | Henry Guckel | 1998-02-17 |