Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8453312 | Method of manufacturing vibrating micromechanical structures | Ijaz Jafri, Galen Magendanz | 2013-06-04 |
| 7836574 | Method of manufacturing vibrating micromechanical structures | Ijaz Jafri, Galen Magendanz | 2010-11-23 |
| 7516661 | Z offset MEMS device | Galen Magendanz, Peter H. LaFond, Mark Williams, Michael Foster | 2009-04-14 |
| 7406761 | Method of manufacturing vibrating micromechanical structures | Ijaz Jafri, Galen Magendanz | 2008-08-05 |
| 5908719 | Radiation mask adapted to be aligned with a photoresist layer and method of making the same | Henry Guckel, Harald Emmerich | 1999-06-01 |
| 5866281 | Alignment method for multi-level deep x-ray lithography utilizing alignment holes and posts | Henry Guckel, Harald Emmerich | 1999-02-02 |
| 5679502 | Method and apparatus for micromachining using hard X-rays | David Peter Siddons, Erik D. Johnson, Henry Guckel | 1997-10-21 |
| 5644177 | Micromechanical magnetically actuated devices | Henry Guckel, Thomas L. Earles | 1997-07-01 |