Issued Patents All Time
Showing 1–22 of 22 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12388411 | Single anchor resonators | Amir Rahafrooz, Diego EMILIO SERRANO, Thomas Kieran Nunan | 2025-08-12 |
| 11725941 | Sensing device | Amir Rahafrooz, Diego Emilio Serrano | 2023-08-15 |
| 11358858 | Semiconductor device and method of manufacturing thereof | Amir Rahafrooz, Thomas Kieran Nunan, Diego EMILIO SERRANO | 2022-06-14 |
| 10082394 | Method and apparatus for electrostatic mode-alignment on planar MEMS gyroscopes | Amir Rahafrooz, Diego Emilio Serrano | 2018-09-25 |
| 8453312 | Method of manufacturing vibrating micromechanical structures | Jonathan L. Klein, Galen Magendanz | 2013-06-04 |
| 8053265 | Mitigation of high stress areas in vertically offset structures | Michael Foster | 2011-11-08 |
| 7836574 | Method of manufacturing vibrating micromechanical structures | Jonathan L. Klein, Galen Magendanz | 2010-11-23 |
| 7830003 | Mechanical isolation for MEMS devices | Michael Foster, Mark Eskridge, Shifang Zhou | 2010-11-09 |
| 7668505 | Radio having a MEMS preselect filter | David C. Vacanti, Keith A. Bayern | 2010-02-23 |
| 7662654 | Vacuum packaged single crystal silicon device | Galen Magendanz | 2010-02-16 |
| 7662655 | Vacuum packaged single crystal silicon device | Galen Magendanz | 2010-02-16 |
| 7406761 | Method of manufacturing vibrating micromechanical structures | Jonathan L. Klein, Galen Magendanz | 2008-08-05 |
| 7407826 | Vacuum packaged single crystal silicon device | Galen Magendanz | 2008-08-05 |
| 7402905 | Methods of fabrication of wafer-level vacuum packaged devices | Mark Eskridge | 2008-07-22 |
| 6612317 | Supercritical fluid delivery and recovery system for semiconductor wafer processing | Michael Costantini, Mohan Chandra, Heiko Moritz, David Mount, Rick M. Heathwaite | 2003-09-02 |
| 6602349 | Supercritical fluid cleaning process for precision surfaces | Mohan Chandra, David Mount, Michael Costantini, Heiko Moritz, Jim Boyd +1 more | 2003-08-05 |
| 6508259 | Inverted pressure vessel with horizontal through loading | James A. Tseronis, Heiko D. Mortiz, Mohan Chandra, Robert B. Farmer, Jonathan A. Talbott | 2003-01-21 |
| 6365225 | Cold wall reactor and method for chemical vapor deposition of bulk polysilicon | Mohan Chandra, Kedar P. Gupta, Jonathan A. Talbott, Vishwanath Prasad | 2002-04-02 |
| 6334266 | Supercritical fluid drying system and method of use | Heiko Moritz, Jonathan A. Talbott, Mohan Chandra, James A. Tseronis | 2002-01-01 |
| 6284312 | Method and apparatus for chemical vapor deposition of polysilicon | Mohan Chandra, Kedar P. Gupta, Vishwanath Prasad, Jonathan A. Talbott | 2001-09-04 |
| 6067728 | Supercritical phase wafer drying/cleaning system | Robert B. Farmer, Bernard Jones, Kedar P. Gupta, Derek M. Dispensa | 2000-05-30 |
| 6019841 | Method and apparatus for synthesis and growth of semiconductor crystals | Mohan Chandra, Rick White, Kedar P. Gupta, Robert B. Farmer, Bernard Jones +1 more | 2000-02-01 |