Issued Patents All Time
Showing 1–23 of 23 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12388411 | Single anchor resonators | Amir Rahafrooz, Diego EMILIO SERRANO, Ijaz Jafri | 2025-08-12 |
| 11614328 | Sensing device | Sagnik Pal, Diego Emilio Serrano | 2023-03-28 |
| 11358858 | Semiconductor device and method of manufacturing thereof | Amir Rahafrooz, Diego EMILIO SERRANO, Ijaz Jafri | 2022-06-14 |
| 11097942 | Through silicon via (TSV) formation in integrated circuits | Li Chen | 2021-08-24 |
| 10081535 | Apparatus and method for shielding and biasing in MEMS devices encapsulated by active circuitry | Li Chen, Kuang L. Yang, Jeffrey A. Gregory | 2018-09-25 |
| 9917243 | Method of fabricating piezoelectric MEMS devices | Eugene Oh Hwang, Sunil Bhave | 2018-03-13 |
| 9764946 | MEMs device with outgassing shield | Li Chen, Kuang L. Yang | 2017-09-19 |
| 9556017 | Apparatus and method for preventing stiction of MEMS devices encapsulated by active circuitry | Li Chen, Kuang L. Yang | 2017-01-31 |
| 9446948 | Apparatus and method of forming a MEMS device with etch channels | — | 2016-09-20 |
| 9242856 | Microchip with blocking apparatus | Li Chen, Kuang L. Yang | 2016-01-26 |
| 9105644 | Apparatus and method for forming alignment features for back side processing of a wafer | Christine H. Tsau, William D. Sawyer | 2015-08-11 |
| 8749036 | Microchip with blocking apparatus and method of fabricating microchip | Li Chen, Kuang L. Yang | 2014-06-10 |
| 8507306 | Reduced stiction MEMS device with exposed silicon carbide | Li Chen, Christine H. Tsau, Kuang L. Yang | 2013-08-13 |
| 8507913 | Method of bonding wafers | Changhan Hobie Yun, Christine H. Tsau | 2013-08-13 |
| 8389314 | MEMS device with roughened surface and method of producing the same | John R. Martin, Thomas Chen, Jinbo Kuang, Xin Zhang | 2013-03-05 |
| 8227876 | Single crystal silicon sensor with additional layer and method of producing the same | Timothy J. Brosnihan | 2012-07-24 |
| 8227286 | Single crystal silicon sensor with additional layer and method of producing the same | Timothy J. Brosnihan | 2012-07-24 |
| 8129803 | Micromachined microphone and multisensor and method for producing same | John R. Martin, Timothy J. Brosnihan, Craig Core, Jason W. Weigold, Xin Zhang | 2012-03-06 |
| 7825484 | Micromachined microphone and multisensor and method for producing same | John R. Martin, Timothy J. Brosnihan, Craig Core, Jason W. Weigold, Xin Zhang | 2010-11-02 |
| 7754617 | Polysilicon deposition and anneal process enabling thick polysilicon films for MEMS applications | — | 2010-07-13 |
| 7138694 | Single crystal silicon sensor with additional layer and method of producing the same | Timothy J. Brosnihan | 2006-11-21 |
| 6936918 | MEMS device with conductive path through substrate | Kieran P. Harney, Lawrence E. Felton, Susan A. Alie, Bruce Wachtmann | 2005-08-30 |
| 6747338 | Composite dielectric with improved etch selectivity for high voltage MEMS structures | David Grosjean, Denis O'Kane, James S. Sellars | 2004-06-08 |