Issued Patents All Time
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12092460 | Silicon MEMS gyroscopes with upper and lower sense plates | Eugene H. Cook, Jonathan J. Bernstein, Mirela G. Bancu, Marc S. Weinberg | 2024-09-17 |
| 11530917 | Methods for fabricating silicon MEMS gyroscopes with upper and lower sense plates | Eugene H. Cook, Jonathan J. Bernstein, Mirela G. Bancu, Marc S. Weinberg | 2022-12-20 |
| 11327102 | Miniature electric field detector | James A. Bickford, Stephanie Lynne Golmon, Paul A. Ward, Marc S. Weinberg, John J. Le Blanc +7 more | 2022-05-10 |
| 10859620 | Miniature electric field detector | James A. Bickford, Stephanie Lynne Golmon, Paul A. Ward, Marc S. Weinberg, John J. LeBlanc +7 more | 2020-12-08 |
| 9105644 | Apparatus and method for forming alignment features for back side processing of a wafer | Christine H. Tsau, Thomas Kieran Nunan | 2015-08-11 |
| 9039976 | MEMS sensors with closed nodal anchors for operation in an in-plane contour mode | Andrew Sparks | 2015-05-26 |
| 8809135 | MEMS device and interposer and method for integrating MEMS device and interposer | — | 2014-08-19 |
| 8631700 | Resonating sensor with mechanical constraints | Firas Sammoura | 2014-01-21 |
| 8215151 | MEMS stiction testing apparatus and method | Firas Sammoura, Kuang L. Yang | 2012-07-10 |
| 7655538 | MEMS device and interposer and method for integrating MEMS device and interposer | — | 2010-02-02 |
| 7381630 | Method for integrating MEMS device and interposer | — | 2008-06-03 |
| 7335527 | Method for microfabricating structures using silicon-on-insulator material | Jeffrey T. Borenstein | 2008-02-26 |
| 7172919 | Method for fabricating a tuning fork gyroscope | Marc S. Weinberg, Anthony S. Kourepenis, Jeffrey T. Borenstein, James Connelly, Amy Duwel +2 more | 2007-02-06 |
| 6946314 | Method for microfabricating structures using silicon-on-insulator material | Jeffrey T. Borenstein | 2005-09-20 |
| 6862934 | Tuning fork gyroscope | Marc S. Weinberg, Anthony S. Kourepenis, Jeffrey T. Borenstein, James Connelly, Amy Duwel +2 more | 2005-03-08 |
| 6548321 | Method of anodically bonding a multilayer device with a free mass | — | 2003-04-15 |
| 4714523 | Suction roll seal strips with teflon insert | William D. Sawyer | 1987-12-22 |
| 4697728 | Paper web spreading shoe | William D. Sawyer | 1987-10-06 |