Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12092460 | Silicon MEMS gyroscopes with upper and lower sense plates | Eugene H. Cook, Jonathan J. Bernstein, Marc S. Weinberg, William D. Sawyer | 2024-09-17 |
| 11530917 | Methods for fabricating silicon MEMS gyroscopes with upper and lower sense plates | Eugene H. Cook, Jonathan J. Bernstein, Marc S. Weinberg, William D. Sawyer | 2022-12-20 |
| 8187902 | High performance sensors and methods for forming the same | Marc S. Weinberg, James A. Bickford, Jonathan J. Bernstein, Richard Elliott | 2012-05-29 |
| 6912078 | Electrostatically actuated micro-electro-mechanical devices and method of manufacture | Thomas Kudrle, Carlos H. Mastrangelo, Marc Waelti, ChuanChe Wang, Gordon M. Shedd +2 more | 2005-06-28 |