Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11696078 | Robust MEMS microphone | Hamid Basaeri, Robert J. Littrell | 2023-07-04 |
| 11438706 | Robust MEMS microphone | Hamid Basaeri, Robert J. Littrell | 2022-09-06 |
| 11099078 | Acoustic sensor with temperature structure | Robert J. Littrell, Yu Hui, Ronald Gagnon | 2021-08-24 |
| 10825982 | Piezoelectric micro-electro-mechanical systems (MEMS) device with a beam strengthening physical element | Robert J. Littrell, Karl Grosh, Yu Hui, Wang Kyung Sung | 2020-11-03 |
| 8129803 | Micromachined microphone and multisensor and method for producing same | John R. Martin, Timothy J. Brosnihan, Thomas Kieran Nunan, Jason W. Weigold, Xin Zhang | 2012-03-06 |
| 7825484 | Micromachined microphone and multisensor and method for producing same | John R. Martin, Timothy J. Brosnihan, Thomas Kieran Nunan, Jason W. Weigold, Xin Zhang | 2010-11-02 |
| 7703339 | Flow sensor chip | Robert E. Sulouff, Jr. | 2010-04-27 |
| 6352935 | Method of forming a cover cap for semiconductor wafer devices | David J. Collins, Lawrence E. Felton, Jing Luo | 2002-03-05 |
| 5480831 | Method of forming a self-aligned capacitor | — | 1996-01-02 |