Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7108001 | Method and apparatus for rotation of a workpiece in supercritical fluid solutions for removing photo resist, residues and particles therefrom | Keith Pope, Laura Rothman, Rick White, Clifton Busby, Stephen Douglas +1 more | 2006-09-19 |
| 6935352 | Adding energy to a cleaning process fluid for removing photo resist, residues and particles from semiconductor substrates, photo masks, reticles, disks and flat-panel displays | — | 2005-08-30 |
| 6624081 | Enhanced etching/smoothing of dielectric surfaces | Jerald P. Dykstra, Wesley Skinner, Allen R. Kirkpatrick | 2003-09-23 |
| 6612317 | Supercritical fluid delivery and recovery system for semiconductor wafer processing | Michael Costantini, Mohan Chandra, Heiko Moritz, Ijaz Jafri, Rick M. Heathwaite | 2003-09-02 |
| 6602349 | Supercritical fluid cleaning process for precision surfaces | Mohan Chandra, Michael Costantini, Heiko Moritz, Ijaz Jafri, Jim Boyd +1 more | 2003-08-05 |
| 6331227 | Enhanced etching/smoothing of dielectric surfaces | Jerald P. Dykstra, Wesley Skinner, Allen R. Kirkpatrick | 2001-12-18 |