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Methods for modifying features of a workpiece using a gas cluster ion beam |
Reinhard Wagner |
2009-12-01 |
| 7410890 |
Formation of doped regions and/or ultra-shallow junctions in semiconductor materials by gas-cluster ion irradiation |
Allen R. Kirkpatrick, Sean R. Kirkpatrick, Martin D. Tabat, Thomas G. Tetreault, John O. Borland +1 more |
2008-08-12 |
| 7396745 |
Formation of ultra-shallow junctions by gas-cluster ion irradiation |
John O. Borland, John Hautala |
2008-07-08 |
| 7259036 |
Methods of forming doped and un-doped strained semiconductor materials and semiconductor films by gas-cluster-ion-beam irradiation and materials and film products |
John O. Borland, John Hautala, Martin D. Tabat |
2007-08-21 |
| 6812147 |
GCIB processing to improve interconnection vias and improved interconnection via |
John Hautala |
2004-11-02 |
| 6624081 |
Enhanced etching/smoothing of dielectric surfaces |
Jerald P. Dykstra, David Mount, Allen R. Kirkpatrick |
2003-09-23 |
| 6613240 |
Method and apparatus for smoothing thin conductive films by gas cluster ion beam |
Allen R. Kirkpatrick |
2003-09-02 |
| 6331227 |
Enhanced etching/smoothing of dielectric surfaces |
Jerald P. Dykstra, David Mount, Allen R. Kirkpatrick |
2001-12-18 |