Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9355864 | Method for increasing adhesion of copper to polymeric surfaces | Georgiy Seryogin, Stephen N. Golovato, Ramya Chandrasekaran | 2016-05-31 |
| 7883999 | Method for increasing the penetration depth of material infusion in a substrate using a gas cluster ion beam | Yan Shao, John Hautala | 2011-02-08 |
| 7564024 | Methods and apparatus for assigning a beam intensity profile to a gas cluster ion beam used to process workpieces | Nicolaus J. Hofmeester, Steven P. Caliendo, Ruairidh MacCrimmon | 2009-07-21 |
| 7410890 | Formation of doped regions and/or ultra-shallow junctions in semiconductor materials by gas-cluster ion irradiation | Allen R. Kirkpatrick, Sean R. Kirkpatrick, Martin D. Tabat, John O. Borland, John Hautala +1 more | 2008-08-12 |