Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8298432 | Method and system for adjusting beam dimension for high-gradient location specific processing | Ruairidh MacCrimmon, Steven P. Caliendo | 2012-10-30 |
| 8293126 | Method and system for multi-pass correction of substrate defects | Ruairidh MacCrimmon, Steven P. Caliendo | 2012-10-23 |
| 7917241 | Method and system for increasing throughput during location specific processing of a plurality of substrates | Steven P. Caliendo | 2011-03-29 |
| 7564024 | Methods and apparatus for assigning a beam intensity profile to a gas cluster ion beam used to process workpieces | Steven P. Caliendo, Thomas G. Tetreault, Ruairidh MacCrimmon | 2009-07-21 |