Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10256095 | Method for high throughput using beam scan size and beam position in gas cluster ion beam processing system | Soo Doo Chae, Noel Russell, Joshua LaRose, Nicholas Joy, Luis Fernandez +3 more | 2019-04-09 |
| 9502209 | Multi-step location specific process for substrate edge profile correction for GCIB system | Hongyu Yue, Noel Russell, Vincent Gizzo, Joshua LaRose | 2016-11-22 |
| 9105443 | Multi-step location specific process for substrate edge profile correction for GCIB system | Hongyu Yue, Noel Russell, Vincent Gizzo, Joshua LaRose | 2015-08-11 |
| 8298432 | Method and system for adjusting beam dimension for high-gradient location specific processing | Ruairidh MacCrimmon, Nicolaus J. Hofmeester | 2012-10-30 |
| 8293126 | Method and system for multi-pass correction of substrate defects | Ruairidh MacCrimmon, Nicolaus J. Hofmeester | 2012-10-23 |
| 7917241 | Method and system for increasing throughput during location specific processing of a plurality of substrates | Nicolaus J. Hofmeester | 2011-03-29 |
| 7564024 | Methods and apparatus for assigning a beam intensity profile to a gas cluster ion beam used to process workpieces | Nicolaus J. Hofmeester, Thomas G. Tetreault, Ruairidh MacCrimmon | 2009-07-21 |
| 7521089 | Method and apparatus for controlling the movement of CVD reaction byproduct gases to adjacent process chambers | Joseph T. Hillman, John G. North, John Hautala | 2009-04-21 |
| 6626186 | Method for stabilizing the internal surface of a PECVD process chamber | Joseph T. Hillman, Gerrit J. Leusink | 2003-09-30 |
| 6562708 | Method for incorporating silicon into CVD metal films | Joseph T. Hillman | 2003-05-13 |
| 6482477 | Method for pretreating dielectric layers to enhance the adhesion of CVD metal layers thereto | Richard Westhoff, Joseph T. Hillman | 2002-11-19 |
| 6455414 | Method for improving the adhesion of sputtered copper films to CVD transition metal based underlayers | Joseph T. Hillman, Cory Wajda | 2002-09-24 |