Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10971411 | Hybrid corrective processing system and method | Brian D. Pfeifer, Vincent Lagana-Gizzo, Noel Russell | 2021-04-06 |
| 10256095 | Method for high throughput using beam scan size and beam position in gas cluster ion beam processing system | Soo Doo Chae, Noel Russell, Nicholas Joy, Luis Fernandez, Allen J. Leith +3 more | 2019-04-09 |
| 10096527 | Hybrid corrective processing system and method | Brian D. Pfeifer, Vincent Lagana-Gizzo, Noel Russell | 2018-10-09 |
| 9875947 | Method of surface profile correction using gas cluster ion beam | Noel Russell, Soo Doo Chae, Vincent Gizzo, Nicholas Joy | 2018-01-23 |
| 9502209 | Multi-step location specific process for substrate edge profile correction for GCIB system | Hongyu Yue, Noel Russell, Vincent Gizzo, Steven P. Caliendo | 2016-11-22 |
| 9123505 | Apparatus and methods for implementing predicted systematic error correction in location specific processing | Vincent Lagana-Gizzo, Noel Russell, Soo Doo Chae | 2015-09-01 |
| 9105443 | Multi-step location specific process for substrate edge profile correction for GCIB system | Hongyu Yue, Noel Russell, Vincent Gizzo, Steven P. Caliendo | 2015-08-11 |