Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9875947 | Method of surface profile correction using gas cluster ion beam | Noel Russell, Soo Doo Chae, Joshua LaRose, Nicholas Joy | 2018-01-23 |
| 9502209 | Multi-step location specific process for substrate edge profile correction for GCIB system | Hongyu Yue, Noel Russell, Joshua LaRose, Steven P. Caliendo | 2016-11-22 |
| 9105443 | Multi-step location specific process for substrate edge profile correction for GCIB system | Hongyu Yue, Noel Russell, Joshua LaRose, Steven P. Caliendo | 2015-08-11 |